The execution of Order 66 is easily one of Star Wars' greatest tragedies, but it has a much more massive scale than some might think, as revealed by Darth Vader and his Inquisitors. The Inquisitors, who first appeared in the animated Star Wars Rebels series, were a vital part of enforcing Order 66 long after the first command was given by Emperor Palpatine to the clones. With Darth Vader placed in charge of these Force-sensitive hunters, they were all held to high standards, and thus succeeded very well in continuing the extinction of the Jedi Order.
https://screenrant.com/star-wars-inquisitors-order-66-last-plan/